6"/8" Manual Probe Station

Features & Specifications

Primarily constructed of black anodized aluminum and stainless steel for rugged dependability.

Compact size and small footprint.
Height = 17" Depth = 19" Width = 20"

Manual stage provides a full 6"/8" of travel for both X and Y axis and 90 degrees of rotation.
Mechanical drive ratios: Y-Axis = 19.8:1 X-Axis = 3.25:1 Rotation = 1:1
Planarization: Adjustable to befter than 0.0005" over chuck surface

Vacuum actuated chuck, gold plated or stainless steel
Flatness: +/-0.0001"

Pull-out stage provides easy and clear access for loading/unloading wafers.

Eccentirc-drive lift mechanism provides 1/4" of travel with smooth, no-bounce probe contact.
Repeatability: +/-0.0001"

Micrometer adjustable over travel for control of probe compression.
Graduations: 0.001" Accuracy: 0.0001"

Unique 3-point clamps allow for rotational alignment of probe array and quick change of rings.

Leveling pads allow for secure and level adjustment to mounting surface.

Optional ring insert accepts up to 12 individual probe positioners or standard 4-1/2" probe card.

Optional air shock anti-vibration mounting for high magnification applications.

Optional focus block can be configured for mounting optical or video microscopes.

Mechanical drive ratio of 280:1 eliminates the need for separate coarse and fine
focus, and produces a light-touch high precision movement.